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1 Ergebnisse
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Sacrificial grid release technology: a versatile release co..:
Zhao, Y
;
Janssens, Y L
;
Veltkamp, H-W
...
Journal of Micromechanics and Microengineering. 31 (2021) 4 - p. 045013 , 2021
Link:
https://doi.org/10.1088/1361-6439/abe7da
RT Journal T1 <Title>Sacrificial grid release technology: a versatile release concept for MEMS structures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_abe7da&Exemplar=1&LAN=DE A1 Zhao, Y A1 Janssens, Y L A1 Veltkamp, H-W A1 de Boer, M J A1 Groenesteijn, J A1 Tas, N R A1 Wiegerink, R J A1 Lötters, J C PB IOP Publishing YR 2021 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 31 IS 4 SP 045013 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/abe7da DO https://doi.org/10.1088/1361-6439/abe7da SF ELIB - SuUB Bremen
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