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1 Ergebnisse
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Evaluation of the impact of abnormal grains on the performa..:
Liu, Chen
;
Li, Minghua
;
Chen, Bangtao
...
Journal of Micromechanics and Microengineering. 32 (2022) 3 - p. 034002 , 2022
Link:
https://doi.org/10.1088/1361-6439/ac4826
RT Journal T1 <Title>Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ac4826&Exemplar=1&LAN=DE A1 Liu, Chen A1 Li, Minghua A1 Chen, Bangtao A1 Zhang, Ying A1 Zhu, Yao A1 Wang, Nan PB IOP Publishing YR 2022 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 32 IS 3 SP 034002 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ac4826 DO https://doi.org/10.1088/1361-6439/ac4826 SF ELIB - SuUB Bremen
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