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1 Ergebnisse
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A novel MEMS inertial switch with frictional electrode:
Du, Liqun
;
Yang, Xiaochen
;
Guo, Bingjiang
...
Journal of Micromechanics and Microengineering. 32 (2022) 6 - p. 065008 , 2022
Link:
https://doi.org/10.1088/1361-6439/ac6b7f
RT Journal T1 <Title>A novel MEMS inertial switch with frictional electrode</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ac6b7f&Exemplar=1&LAN=DE A1 Du, Liqun A1 Yang, Xiaochen A1 Guo, Bingjiang A1 Dong, Yakun A1 Yuan, Bowen A1 Zhao, Jian A1 Liu, Junshan PB IOP Publishing YR 2022 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 32 IS 6 SP 065008 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ac6b7f DO https://doi.org/10.1088/1361-6439/ac6b7f SF ELIB - SuUB Bremen
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