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1 Ergebnisse
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Wet bulk micromachining characteristics of Si{110} in NaOH-..:
Purohit, S
;
Swarnalatha, V
;
Pandey, A K
..
Journal of Micromechanics and Microengineering. 32 (2022) 12 - p. 124001 , 2022
Link:
https://doi.org/10.1088/1361-6439/ac9b64
RT Journal T1 <Title>Wet bulk micromachining characteristics of Si{110} in NaOH-based solution</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ac9b64&Exemplar=1&LAN=DE A1 Purohit, S A1 Swarnalatha, V A1 Pandey, A K A1 Sharma, R K A1 Pal, P PB IOP Publishing YR 2022 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 32 IS 12 SP 124001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ac9b64 DO https://doi.org/10.1088/1361-6439/ac9b64 SF ELIB - SuUB Bremen
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