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1 Ergebnisse
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Experimental analysis of a low controlling voltage tri-elec..:
Allameh, Mehdi
;
Zhou, Yu
;
Chen, Tao
...
Journal of Micromechanics and Microengineering. 33 (2023) 3 - p. 035008 , 2023
Link:
https://doi.org/10.1088/1361-6439/acb956
RT Journal T1 <Title>Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_acb956&Exemplar=1&LAN=DE A1 Allameh, Mehdi A1 Zhou, Yu A1 Chen, Tao A1 Chrusch, Dwayne A1 Park, Byoungyoul A1 Shafai, Cyrus PB IOP Publishing YR 2023 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 33 IS 3 SP 035008 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/acb956 DO https://doi.org/10.1088/1361-6439/acb956 SF ELIB - SuUB Bremen
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