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1 Ergebnisse
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DMD maskless digital lithography based on stepwise rotary s..:
Yuan, Qixiang
;
Liu, Chunxia
;
Huang, Long
...
Journal of Micromechanics and Microengineering. 33 (2023) 4 - p. 045003 , 2023
Link:
https://doi.org/10.1088/1361-6439/acba27
RT Journal T1 <Title>DMD maskless digital lithography based on stepwise rotary stitching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_acba27&Exemplar=1&LAN=DE A1 Yuan, Qixiang A1 Liu, Chunxia A1 Huang, Long A1 Zhao, Shaoqing A1 Wang, Zhengxiao A1 Zhang, Han A1 Liu, Minzhe A1 Jia, Zhongqing A1 Zhai, Ruizhan A1 Lu, Zifeng A1 Liu, Hua PB IOP Publishing YR 2023 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 33 IS 4 SP 045003 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/acba27 DO https://doi.org/10.1088/1361-6439/acba27 SF ELIB - SuUB Bremen
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