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1 Ergebnisse
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Measurement and control of stiction force in in-plane elect..:
Mamun, Md Ataul
;
Smith, Bennett
;
Horstmann, Benjamin
...
Journal of Micromechanics and Microengineering. 33 (2023) 8 - p. 085006 , 2023
Link:
https://doi.org/10.1088/1361-6439/acdc32
RT Journal T1 <Title>Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_acdc32&Exemplar=1&LAN=DE A1 Mamun, Md Ataul A1 Smith, Bennett A1 Horstmann, Benjamin A1 Ding, Kai A1 Atkinson, Gary A1 Özgür, Ümit A1 Avrutin, Vitaliy PB IOP Publishing YR 2023 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 33 IS 8 SP 085006 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/acdc32 DO https://doi.org/10.1088/1361-6439/acdc32 SF ELIB - SuUB Bremen
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