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1 Ergebnisse
1
Effect of SiO2 protective layer on LiNbO3 structured SAW re..:
Qiang, Liu
;
Wenlong, Yang
;
Chi, Chen
..
Journal of Micromechanics and Microengineering. 33 (2023) 10 - p. 105014 , 2023
Link:
https://doi.org/10.1088/1361-6439/acef33
RT Journal T1 <Title>Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_acef33&Exemplar=1&LAN=DE A1 Qiang, Liu A1 Wenlong, Yang A1 Chi, Chen A1 Hongyuan, Li A1 Hong, Xu PB IOP Publishing YR 2023 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 33 IS 10 SP 105014 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/acef33 DO https://doi.org/10.1088/1361-6439/acef33 SF ELIB - SuUB Bremen
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