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1 Ergebnisse
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Triaxial piezoresistive force sensor probe with high sensit..:
Takahashi, Hidetoshi
;
Takei, Yusuke
;
Noda, Kentaro
..
Journal of Micromechanics and Microengineering. 33 (2023) 12 - p. 125005 , 2023
Link:
https://doi.org/10.1088/1361-6439/ad00c6
RT Journal T1 <Title>Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad00c6&Exemplar=1&LAN=DE A1 Takahashi, Hidetoshi A1 Takei, Yusuke A1 Noda, Kentaro A1 Matsumoto, Kiyoshi A1 Shimoyama, Isao PB IOP Publishing YR 2023 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 33 IS 12 SP 125005 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad00c6 DO https://doi.org/10.1088/1361-6439/ad00c6 SF ELIB - SuUB Bremen
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