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1 Ergebnisse
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Experimental study on femtosecond laser ablation of 4H–SiC ..:
Zhao, Ziqiang
;
Zhao, Lin
;
Peng, Yun
Journal of Micromechanics and Microengineering. 34 (2024) 2 - p. 025005 , 2024
Link:
https://doi.org/10.1088/1361-6439/ad1c74
RT Journal T1 <Title>Experimental study on femtosecond laser ablation of 4H–SiC substrate</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad1c74&Exemplar=1&LAN=DE A1 Zhao, Ziqiang A1 Zhao, Lin A1 Peng, Yun PB IOP Publishing YR 2024 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 34 IS 2 SP 025005 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad1c74 DO https://doi.org/10.1088/1361-6439/ad1c74 SF ELIB - SuUB Bremen
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