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1 Ergebnisse
1
Design and fabrication of a sensors-integrated silicon elec..:
Zhu, Yulan
;
Liu, Guodong
;
Li, Yong
.
Journal of Micromechanics and Microengineering. 34 (2024) 4 - p. 045001 , 2024
Link:
https://doi.org/10.1088/1361-6439/ad2c1f
RT Journal T1 <Title>Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad2c1f&Exemplar=1&LAN=DE A1 Zhu, Yulan A1 Liu, Guodong A1 Li, Yong A1 Tong, Hao PB IOP Publishing YR 2024 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 34 IS 4 SP 045001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad2c1f DO https://doi.org/10.1088/1361-6439/ad2c1f SF ELIB - SuUB Bremen
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