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1 Ergebnisse
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Study on the mechanism of glass-SiC-glass anodic bonding pr..:
Cheng, Xiao
;
Hu, Lifang
;
Liu, Wei
...
Journal of Micromechanics and Microengineering. 34 (2024) 4 - p. 045010 , 2024
Link:
https://doi.org/10.1088/1361-6439/ad3657
RT Journal T1 <Title>Study on the mechanism of glass-SiC-glass anodic bonding process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad3657&Exemplar=1&LAN=DE A1 Cheng, Xiao A1 Hu, Lifang A1 Liu, Wei A1 Chou, Zhao A1 Jia, Weijie A1 Mu, Wenjin PB IOP Publishing YR 2024 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 34 IS 4 SP 045010 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad3657 DO https://doi.org/10.1088/1361-6439/ad3657 SF ELIB - SuUB Bremen
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