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1 Ergebnisse
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Theoretical modeling and experimental investigation of in-p..:
Chen, Wenhao
;
Luo, Huahuang
;
Tavakkoli, Hadi
...
Journal of Micromechanics and Microengineering. 34 (2024) 5 - p. 055002 , 2024
Link:
https://doi.org/10.1088/1361-6439/ad3763
RT Journal T1 <Title>Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad3763&Exemplar=1&LAN=DE A1 Chen, Wenhao A1 Luo, Huahuang A1 Tavakkoli, Hadi A1 Duan, Mingzheng A1 Piyawattanametha, Wibool A1 Lee, Yi-Kuen PB IOP Publishing YR 2024 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 34 IS 5 SP 055002 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad3763 DO https://doi.org/10.1088/1361-6439/ad3763 SF ELIB - SuUB Bremen
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