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1 Ergebnisse
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A scandium doped aluminum nitride thin film bulk acoustic r..:
Gao, Chao
;
Wang, Yaxin
;
Cai, Yao
...
Journal of Micromechanics and Microengineering. 34 (2024) 8 - p. 085006 , 2024
Link:
https://doi.org/10.1088/1361-6439/ad5562
RT Journal T1 <Title>A scandium doped aluminum nitride thin film bulk acoustic resonator</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ad5562&Exemplar=1&LAN=DE A1 Gao, Chao A1 Wang, Yaxin A1 Cai, Yao A1 Lin, Binghui A1 Zou, Yang A1 Xu, Qinwen A1 Yang, Tingting A1 Liu, Wenjuan A1 Liu, Yan A1 Guo, Shishang A1 Sun, Chengliang PB IOP Publishing YR 2024 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 34 IS 8 SP 085006 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ad5562 DO https://doi.org/10.1088/1361-6439/ad5562 SF ELIB - SuUB Bremen
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