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1 Ergebnisse
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Two- and three-dimensional simulation analysis of microwave..:
Baeva, M
;
Hempel, F
;
Baierl, H
...
Journal of Physics D: Applied Physics. 51 (2018) 38 - p. 385202 , 2018
Link:
https://doi.org/10.1088/1361-6463/aad537
RT Journal T1 <Title>Two- and three-dimensional simulation analysis of microwave excited plasma for deposition applications: operation with argon at atmospheric pressure</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_aad537&Exemplar=1&LAN=DE A1 Baeva, M A1 Hempel, F A1 Baierl, H A1 Trautvetter, T A1 Foest, R A1 Loffhagen, D PB IOP Publishing YR 2018 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 51 IS 38 SP 385202 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/aad537 DO https://doi.org/10.1088/1361-6463/aad537 SF ELIB - SuUB Bremen
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