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1 Ergebnisse
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Simultaneous measurement of CH4 concentration and temperatu..:
Hayashi, Daisuke
;
Nakai, Junya
;
Minami, Masakazu
..
Journal of Physics D: Applied Physics. 52 (2019) 48 - p. 485107 , 2019
Link:
https://doi.org/10.1088/1361-6463/ab3c30
RT Journal T1
Simultaneous measurement of CH4 concentration and temperature distributions in a semiconductor process chamber
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_ab3c30&Exemplar=1&LAN=DE A1 Hayashi, Daisuke A1 Nakai, Junya A1 Minami, Masakazu A1 Kamimoto, Takahiro A1 Deguchi, Yoshihiro PB IOP Publishing YR 2019 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 52 IS 48 SP 485107 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/ab3c30 DO https://doi.org/10.1088/1361-6463/ab3c30 SF ELIB - SuUB Bremen
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