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Robust semiconductor-on-ferroelectric structures with hafni..:
Popov, V P
;
Antonov, V A
;
Tikhonenko, F V
...
Journal of Physics D: Applied Physics. 54 (2021) 22 - p. 225101 , 2021
Link:
https://doi.org/10.1088/1361-6463/abe6cb
RT Journal T1 <Title>Robust semiconductor-on-ferroelectric structures with hafnia–zirconia–alumina UTBOX stacks compatible with CMOS technology</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_abe6cb&Exemplar=1&LAN=DE A1 Popov, V P A1 Antonov, V A A1 Tikhonenko, F V A1 Tarkov, S M A1 Gutakovskii, A K A1 Tyschenko, I E A1 Miakonkikh, A V A1 Lomov, A A A1 Rogozhin, A E A1 Rudenko, K V PB IOP Publishing YR 2021 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 54 IS 22 SP 225101 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/abe6cb DO https://doi.org/10.1088/1361-6463/abe6cb SF ELIB - SuUB Bremen
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