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1 Ergebnisse
1
Si sputtering yield amplification: a study of the collision..:
Cruz, J
;
Sanginés, R
;
Soto-Valle, G
...
Journal of Physics D: Applied Physics. 54 (2021) 37 - p. 375201 , 2021
Link:
https://doi.org/10.1088/1361-6463/ac0c4e
RT Journal T1 <Title>Si sputtering yield amplification: a study of the collisions cascade and species in the sputtering plasma</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_ac0c4e&Exemplar=1&LAN=DE A1 Cruz, J A1 Sanginés, R A1 Soto-Valle, G A1 Muhl, S A1 Sierra, I A1 De Lucio-Morales, O A1 Ruvalcaba, J L A1 Mitrani, A A1 Calderón-Olvera, R M A1 Mendoza-Pérez, R A1 Machorro-Mejía, R PB IOP Publishing YR 2021 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 54 IS 37 SP 375201 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/ac0c4e DO https://doi.org/10.1088/1361-6463/ac0c4e SF ELIB - SuUB Bremen
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