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1 Ergebnisse
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Critical-dimension scanning electron microscope characteriz..:
Khan, M S S
;
Yang, L H
;
Deng, X
...
Journal of Physics D: Applied Physics. 54 (2021) 44 - p. 445301 , 2021
Link:
https://doi.org/10.1088/1361-6463/ac0de5
RT Journal T1 <Title>Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_ac0de5&Exemplar=1&LAN=DE A1 Khan, M S S A1 Yang, L H A1 Deng, X A1 Mao, S F A1 Zou, Y B A1 Li, Y G A1 Li, H M A1 Ding, Z J PB IOP Publishing YR 2021 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 54 IS 44 SP 445301 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/ac0de5 DO https://doi.org/10.1088/1361-6463/ac0de5 SF ELIB - SuUB Bremen
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