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Characterisation of silicon oxynitride thin films and their..:
Mota-Santiago, P
;
Nadzri, A
;
Kremer, F
...
Journal of Physics D: Applied Physics. 55 (2022) 14 - p. 145301 , 2022
Link:
https://doi.org/10.1088/1361-6463/ac45b1
RT Journal T1 <Title>Characterisation of silicon oxynitride thin films and their response to swift heavy-ion irradiation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_ac45b1&Exemplar=1&LAN=DE A1 Mota-Santiago, P A1 Nadzri, A A1 Kremer, F A1 Bierschenk, T A1 Canto, C E A1 Rodriguez, M D A1 Notthoff, C A1 Mudie, S A1 Kluth, P PB IOP Publishing YR 2022 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 55 IS 14 SP 145301 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/ac45b1 DO https://doi.org/10.1088/1361-6463/ac45b1 SF ELIB - SuUB Bremen
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