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Current status and new insights about the capacitively coup..:
Makabe, Toshiaki
Journal of Physics D: Applied Physics. 56 (2022) 4 - p. 045203 , 2022
Link:
https://doi.org/10.1088/1361-6463/acaab6
RT Journal T1 <Title>Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_acaab6&Exemplar=1&LAN=DE A1 Makabe, Toshiaki PB IOP Publishing YR 2022 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 56 IS 4 SP 045203 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/acaab6 DO https://doi.org/10.1088/1361-6463/acaab6 SF ELIB - SuUB Bremen
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