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Combined effects of the deposition temperature and metal el..:
Eom, Deokjoon
;
Lee, Jehoon
;
Lee, Woohui
...
Journal of Physics D: Applied Physics. 56 (2023) 6 - p. 065301 , 2023
Link:
https://doi.org/10.1088/1361-6463/acaf0a
RT Journal T1 <Title>Combined effects of the deposition temperature and metal electrodes on ferroelectric properties of atomic-layer-deposited Hf0.5Zr0.5O2 films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_acaf0a&Exemplar=1&LAN=DE A1 Eom, Deokjoon A1 Lee, Jehoon A1 Lee, Woohui A1 Oh, Joohee A1 Park, Changyu A1 Kim, Jinyong A1 Lee, Hyangsook A1 Lee, Eunha A1 Kim, Hyoungsub PB IOP Publishing YR 2023 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 56 IS 6 SP 065301 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/acaf0a DO https://doi.org/10.1088/1361-6463/acaf0a SF ELIB - SuUB Bremen
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