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1 Ergebnisse
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Computational approach for plasma process optimization comb..:
Ko, Jungmin
;
Bae, Jinkyu
;
Park, Minho
...
Journal of Physics D: Applied Physics. 56 (2023) 34 - p. 344001 , 2023
Link:
https://doi.org/10.1088/1361-6463/acd1fd
RT Journal T1
Computational approach for plasma process optimization combined with deep learning model
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_acd1fd&Exemplar=1&LAN=DE A1 Ko, Jungmin A1 Bae, Jinkyu A1 Park, Minho A1 Jo, Younghyun A1 Lee, Hyunjae A1 Kim, Kyunghyun A1 Yoo, Suyoung A1 Nam, Sang Ki A1 Sung, Dougyong A1 Kim, Byungjo PB IOP Publishing YR 2023 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 56 IS 34 SP 344001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/acd1fd DO https://doi.org/10.1088/1361-6463/acd1fd SF ELIB - SuUB Bremen
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