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Prediction of OES intensity ratios based on coating unit da..:
Bobzin, K
;
Kalscheuer, C
;
Möbius, M P
.
Journal of Physics D: Applied Physics. 56 (2023) 36 - p. 364001 , 2023
Link:
https://doi.org/10.1088/1361-6463/acd793
RT Journal T1 <Title>Prediction of OES intensity ratios based on coating unit data in HPPMS processes by ANN</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_acd793&Exemplar=1&LAN=DE A1 Bobzin, K A1 Kalscheuer, C A1 Möbius, M P A1 Schulze, C PB IOP Publishing YR 2023 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 56 IS 36 SP 364001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/acd793 DO https://doi.org/10.1088/1361-6463/acd793 SF ELIB - SuUB Bremen
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