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1 Ergebnisse
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Explainable artificial intelligence-based evidential infere..:
Choi, Jeong Eun
;
An, Surin
;
Lee, Younji
...
Journal of Physics D: Applied Physics. 57 (2024) 18 - p. 185201 , 2024
Link:
https://doi.org/10.1088/1361-6463/ad2339
RT Journal T1
Explainable artificial intelligence-based evidential inferencing on process faults in plasma etching
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6463_ad2339&Exemplar=1&LAN=DE A1 Choi, Jeong Eun A1 An, Surin A1 Lee, Younji A1 Lee, Yongil A1 Kim, Dohyun A1 Hong, Sang Jeen PB IOP Publishing YR 2024 SN 0022-3727 SN 1361-6463 JF Journal of Physics D: Applied Physics VO 57 IS 18 SP 185201 LK http://dx.doi.org/https://doi.org/10.1088/1361-6463/ad2339 DO https://doi.org/10.1088/1361-6463/ad2339 SF ELIB - SuUB Bremen
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