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Modeling of topography measuring instrument transfer functi..:
Keksel, A
;
Eifler, M
;
Seewig, J
Measurement Science and Technology. 29 (2018) 9 - p. 095012 , 2018
Link:
https://doi.org/10.1088/1361-6501/aad467
RT Journal T1 <Title>Modeling of topography measuring instrument transfer functions by time series models</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6501_aad467&Exemplar=1&LAN=DE A1 Keksel, A A1 Eifler, M A1 Seewig, J PB IOP Publishing YR 2018 SN 0957-0233 SN 1361-6501 JF Measurement Science and Technology VO 29 IS 9 SP 095012 LK http://dx.doi.org/https://doi.org/10.1088/1361-6501/aad467 DO https://doi.org/10.1088/1361-6501/aad467 SF ELIB - SuUB Bremen
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