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Application of a machine learning method to model-based lib..:
Guo, P
;
Miao, H
;
Zou, Y B
..
Measurement Science and Technology. 35 (2024) 6 - p. 065002 , 2024
Link:
https://doi.org/10.1088/1361-6501/ad2b44
RT Journal T1 <Title>Application of a machine learning method to model-based library approach for critical dimension measurements using CD-SEM</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6501_ad2b44&Exemplar=1&LAN=DE A1 Guo, P A1 Miao, H A1 Zou, Y B A1 Mao, S F A1 Ding, Z J PB IOP Publishing YR 2024 SN 0957-0233 SN 1361-6501 JF Measurement Science and Technology VO 35 IS 6 SP 065002 LK http://dx.doi.org/https://doi.org/10.1088/1361-6501/ad2b44 DO https://doi.org/10.1088/1361-6501/ad2b44 SF ELIB - SuUB Bremen
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