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Modeling of high power impulse magnetron sputtering dischar..:
Eliasson, H
;
Rudolph, M
;
Brenning, N
...
Plasma Sources Science and Technology. 30 (2021) 11 - p. 115017 , 2021
Link:
https://doi.org/10.1088/1361-6595/ac352c
RT Journal T1 <Title>Modeling of high power impulse magnetron sputtering discharges with graphite target</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac352c&Exemplar=1&LAN=DE A1 Eliasson, H A1 Rudolph, M A1 Brenning, N A1 Hajihoseini, H A1 Zanáška, M A1 Adriaans, M J A1 Raadu, M A A1 Minea, T M A1 Gudmundsson, J T A1 Lundin, D PB IOP Publishing YR 2021 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 30 IS 11 SP 115017 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac352c DO https://doi.org/10.1088/1361-6595/ac352c SF ELIB - SuUB Bremen
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