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The critical role of electron induced secondary electrons i..:
Horváth, B
;
Donkó, Z
;
Schulze, J
.
Plasma Sources Science and Technology. 31 (2022) 4 - p. 045025 , 2022
Link:
https://doi.org/10.1088/1361-6595/ac64bd
RT Journal T1 <Title>The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac64bd&Exemplar=1&LAN=DE A1 Horváth, B A1 Donkó, Z A1 Schulze, J A1 Derzsi, A PB IOP Publishing YR 2022 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 31 IS 4 SP 045025 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac64bd DO https://doi.org/10.1088/1361-6595/ac64bd SF ELIB - SuUB Bremen
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