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Ion energy analysis of a bipolar HiPIMS discharge using a r..:
Walk, F
;
Valizadeh, R
;
Bradley, J W
Plasma Sources Science and Technology. 31 (2022) 6 - p. 065002 , 2022
Link:
https://doi.org/10.1088/1361-6595/ac6a0d
RT Journal T1 <Title>Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac6a0d&Exemplar=1&LAN=DE A1 Walk, F A1 Valizadeh, R A1 Bradley, J W PB IOP Publishing YR 2022 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 31 IS 6 SP 065002 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac6a0d DO https://doi.org/10.1088/1361-6595/ac6a0d SF ELIB - SuUB Bremen
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