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Experimental investigations of plasma dynamics in the hyste..:
Roggendorf, J
;
Berger, B
;
Eremin, D
...
Plasma Sources Science and Technology. 31 (2022) 6 - p. 065007 , 2022
Link:
https://doi.org/10.1088/1361-6595/ac7413
RT Journal T1 <Title>Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac7413&Exemplar=1&LAN=DE A1 Roggendorf, J A1 Berger, B A1 Eremin, D A1 Oberberg, M A1 Engel, D A1 Wölfel, C A1 Zhang, Quan-Zhi A1 Awakowicz, P A1 Lunze, J A1 Schulze, J PB IOP Publishing YR 2022 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 31 IS 6 SP 065007 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac7413 DO https://doi.org/10.1088/1361-6595/ac7413 SF ELIB - SuUB Bremen
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