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1 Ergebnisse
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Spoke-resolved electron density, temperature and potential ..:
Held, J
;
George, M
;
von Keudell, A
Plasma Sources Science and Technology. 31 (2022) 8 - p. 085013 , 2022
Link:
https://doi.org/10.1088/1361-6595/ac87ce
RT Journal T1 <Title>Spoke-resolved electron density, temperature and potential in direct current magnetron sputtering and HiPIMS discharges</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac87ce&Exemplar=1&LAN=DE A1 Held, J A1 George, M A1 von Keudell, A PB IOP Publishing YR 2022 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 31 IS 8 SP 085013 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac87ce DO https://doi.org/10.1088/1361-6595/ac87ce SF ELIB - SuUB Bremen
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