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1 Ergebnisse
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A computationally assisted technique to measure material-sp..:
Schulze, C
;
Donkó, Z
;
Benedikt, J
Plasma Sources Science and Technology. 31 (2022) 10 - p. 105017 , 2022
Link:
https://doi.org/10.1088/1361-6595/ac95c2
RT Journal T1 <Title>A computationally assisted technique to measure material-specific surface coefficients in capacitively coupled plasmas based on characteristics of the ion flux-energy distribution function</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ac95c2&Exemplar=1&LAN=DE A1 Schulze, C A1 Donkó, Z A1 Benedikt, J PB IOP Publishing YR 2022 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 31 IS 10 SP 105017 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ac95c2 DO https://doi.org/10.1088/1361-6595/ac95c2 SF ELIB - SuUB Bremen
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