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High power impulse magnetron sputtering of tungsten: a comp..:
Suresh Babu, Swetha
;
Rudolph, Martin
;
Ryan, Peter John
...
Plasma Sources Science and Technology. 32 (2023) 3 - p. 034003 , 2023
Link:
https://doi.org/10.1088/1361-6595/acc12f
RT Journal T1
High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_acc12f&Exemplar=1&LAN=DE A1 Suresh Babu, Swetha A1 Rudolph, Martin A1 Ryan, Peter John A1 Fischer, Joel A1 Lundin, Daniel A1 Bradley, James W A1 Gudmundsson, Jon Tomas PB IOP Publishing YR 2023 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 32 IS 3 SP 034003 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/acc12f DO https://doi.org/10.1088/1361-6595/acc12f SF ELIB - SuUB Bremen
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