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1 Ergebnisse
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Hybrid simulation of instabilities in capacitively coupled ..:
Dong, Wan
;
Zhang, Yi-Fan
;
Schulze, Julian
.
Plasma Sources Science and Technology. 33 (2024) 2 - p. 025020 , 2024
Link:
https://doi.org/10.1088/1361-6595/ad270e
RT Journal T1
Hybrid simulation of instabilities in capacitively coupled RF CF4/Ar plasmas driven by a dual frequency source
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ad270e&Exemplar=1&LAN=DE A1 Dong, Wan A1 Zhang, Yi-Fan A1 Schulze, Julian A1 Song, Yuan-Hong PB IOP Publishing YR 2024 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology VO 33 IS 2 SP 025020 LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ad270e DO https://doi.org/10.1088/1361-6595/ad270e SF ELIB - SuUB Bremen
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