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1 Ergebnisse
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The detachment-induced mode in electronegative capacitively..:
Tian, Chongbiao
;
Wang, Li
;
Vass, Mate
...
Plasma Sources Science and Technology. , 2024
Link:
https://doi.org/10.1088/1361-6595/ad5df8
RT Journal T1
The detachment-induced mode in electronegative capacitively coupled radio-frequency plasmas
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6595_ad5df8&Exemplar=1&LAN=DE A1 Tian, Chongbiao A1 Wang, Li A1 Vass, Mate A1 Wang, Xiao-Kun A1 Dong, Wan A1 Song, Yuan-Hong A1 Wang, You-Nian A1 Schulze, Julian PB IOP Publishing YR 2024 SN 0963-0252 SN 1361-6595 JF Plasma Sources Science and Technology LK http://dx.doi.org/https://doi.org/10.1088/1361-6595/ad5df8 DO https://doi.org/10.1088/1361-6595/ad5df8 SF ELIB - SuUB Bremen
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