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1 Ergebnisse
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Large area stress free Si layer transfer onto Corning glass..:
Pathak, Ravi
;
Dadwal, U
;
Soni, K K
.
Semiconductor Science and Technology. 34 (2019) 2 - p. 025003 , 2019
Link:
https://doi.org/10.1088/1361-6641/aaf611
RT Journal T1 <Title>Large area stress free Si layer transfer onto Corning glass substrate using ion-cut</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6641_aaf611&Exemplar=1&LAN=DE A1 Pathak, Ravi A1 Dadwal, U A1 Soni, K K A1 Singh, R PB IOP Publishing YR 2019 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 34 IS 2 SP 025003 LK http://dx.doi.org/https://doi.org/10.1088/1361-6641/aaf611 DO https://doi.org/10.1088/1361-6641/aaf611 SF ELIB - SuUB Bremen
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