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1 Ergebnisse
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TEM investigations of gate-all-around nanowire devices:
Favia, P
;
Richard, O
;
Eneman, G
...
Semiconductor Science and Technology. 34 (2019) 12 - p. 124003 , 2019
Link:
https://doi.org/10.1088/1361-6641/ab4b8b
RT Journal T1 <Title>TEM investigations of gate-all-around nanowire devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6641_ab4b8b&Exemplar=1&LAN=DE A1 Favia, P A1 Richard, O A1 Eneman, G A1 Mertens, H A1 Arimura, H A1 Capogreco, E A1 Hikavyy, A A1 Witters, L A1 Kundu, P A1 Loo, R A1 Vancoille, E A1 Bender, H PB IOP Publishing YR 2019 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 34 IS 12 SP 124003 LK http://dx.doi.org/https://doi.org/10.1088/1361-6641/ab4b8b DO https://doi.org/10.1088/1361-6641/ab4b8b SF ELIB - SuUB Bremen
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