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1 Ergebnisse
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Optical and structural properties of AlN thin films deposit..:
Yin, Junhua
;
Zhou, Bangdi
;
Li, Liang
...
Semiconductor Science and Technology. 36 (2021) 4 - p. 045012 , 2021
Link:
https://doi.org/10.1088/1361-6641/abe3c5
RT Journal T1 <Title>Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6641_abe3c5&Exemplar=1&LAN=DE A1 Yin, Junhua A1 Zhou, Bangdi A1 Li, Liang A1 Liu, Yao A1 Guo, Wei A1 Talwar, Devki N A1 He, Kaiyan A1 Ferguson, Ian T A1 Wan, Lingyu A1 Feng, Zhe Chuan PB IOP Publishing YR 2021 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 36 IS 4 SP 045012 LK http://dx.doi.org/https://doi.org/10.1088/1361-6641/abe3c5 DO https://doi.org/10.1088/1361-6641/abe3c5 SF ELIB - SuUB Bremen
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