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1 Ergebnisse
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Fabrication of a freestanding AlN substrate via HVPE homoep..:
Liu, Ting
;
Zhang, Qian
;
Li, Xu
...
Semiconductor Science and Technology. 39 (2023) 1 - p. 015010 , 2023
Link:
https://doi.org/10.1088/1361-6641/ad12df
RT Journal T1 <Title>Fabrication of a freestanding AlN substrate via HVPE homoepitaxy on a PVT-AlN substrate</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6641_ad12df&Exemplar=1&LAN=DE A1 Liu, Ting A1 Zhang, Qian A1 Li, Xu A1 Chen, Minghao A1 Du, Chunhua A1 Sun, Maosong A1 Wang, Jia A1 Tan, Shuxin A1 Zhang, Jicai PB IOP Publishing YR 2023 SN 0268-1242 SN 1361-6641 JF Semiconductor Science and Technology VO 39 IS 1 SP 015010 LK http://dx.doi.org/https://doi.org/10.1088/1361-6641/ad12df DO https://doi.org/10.1088/1361-6641/ad12df SF ELIB - SuUB Bremen
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