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Superconducting niobium titanium nitride thin films deposit..:
Yemane, Y T
;
Sowa, M J
;
Zhang, J
...
Superconductor Science and Technology. 30 (2017) 9 - p. 095010 , 2017
Link:
https://doi.org/10.1088/1361-6668/aa7ce3
RT Journal T1 <Title>Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6668_aa7ce3&Exemplar=1&LAN=DE A1 Yemane, Y T A1 Sowa, M J A1 Zhang, J A1 Ju, L A1 Deguns, E W A1 Strandwitz, N C A1 Prinz, F B A1 Provine, J PB IOP Publishing YR 2017 SN 0953-2048 SN 1361-6668 JF Superconductor Science and Technology VO 30 IS 9 SP 095010 LK http://dx.doi.org/https://doi.org/10.1088/1361-6668/aa7ce3 DO https://doi.org/10.1088/1361-6668/aa7ce3 SF ELIB - SuUB Bremen
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