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1 Ergebnisse
1
Influence comparison of N2 and NH3 nitrogen sources on AlN ..:
Chen, Jing-Jing
;
Huang, Jun
;
Su, Xu-Jun
..
Chinese Physics B. 29 (2020) 7 - p. 076802 , 2020
Link:
https://doi.org/10.1088/1674-1056/ab90ed
RT Journal T1
Influence comparison of N2 and NH3 nitrogen sources on AlN films grown by halide vapor phase epitaxy*
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1674-1056_ab90ed&Exemplar=1&LAN=DE A1 Chen, Jing-Jing A1 Huang, Jun A1 Su, Xu-Jun A1 Niu, Mu-Tong A1 Xu, Ke PB IOP Publishing YR 2020 SN 1674-1056 JF Chinese Physics B VO 29 IS 7 SP 076802 LK http://dx.doi.org/https://doi.org/10.1088/1674-1056/ab90ed DO https://doi.org/10.1088/1674-1056/ab90ed SF ELIB - SuUB Bremen
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