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1 Ergebnisse
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Vertical MBE growth of Si fins on sub-10 nm patterned subst..:
Sun, Shuang
;
Wang, Jian-Huan
;
Zhang, Bao-Tong
...
Chinese Physics B. 30 (2021) 7 - p. 078104 , 2021
Link:
https://doi.org/10.1088/1674-1056/abf63f
RT Journal T1
Vertical MBE growth of Si fins on sub-10 nm patterned substrate for high-performance FinFET technology*
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1674-1056_abf63f&Exemplar=1&LAN=DE A1 Sun, Shuang A1 Wang, Jian-Huan A1 Zhang, Bao-Tong A1 Li, Xiao-Kang A1 Cai, Qi-Feng A1 An, Xia A1 Xu, Xiao-Yan A1 Zhang, Jian-Jun A1 Li, Ming PB IOP Publishing YR 2021 SN 1674-1056 JF Chinese Physics B VO 30 IS 7 SP 078104 LK http://dx.doi.org/https://doi.org/10.1088/1674-1056/abf63f DO https://doi.org/10.1088/1674-1056/abf63f SF ELIB - SuUB Bremen
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