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1 Ergebnisse
1
He and H sequential implantation induced surface blistering..:
Wang, Zhuo
;
Gao, Yu-Jie
;
Li, Meng-Kai
...
Chinese Physics C. 37 (2013) 1 - p. 016001 , 2013
Link:
https://doi.org/10.1088/1674-1137/37/1/016001
RT Journal T1
He and H sequential implantation induced surface blistering and the exfoliation of Si covered with an oxide layer
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1674-1137_37_1_016001&Exemplar=1&LAN=DE A1 Wang, Zhuo A1 Gao, Yu-Jie A1 Li, Meng-Kai A1 Zhu, Fei A1 Zhang, Da-Cheng A1 Liu, Chang-Long PB IOP Publishing YR 2013 SN 1674-1137 JF Chinese Physics C VO 37 IS 1 SP 016001 LK http://dx.doi.org/https://doi.org/10.1088/1674-1137/37/1/016001 DO https://doi.org/10.1088/1674-1137/37/1/016001 SF ELIB - SuUB Bremen
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