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1 Ergebnisse
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The Study on AlxGa1-xN Film Deposition by Radio Frequency M..:
Deng, Danxia
;
Qin, Zuoyan
;
Hu, Hao
...
Journal of Physics: Conference Series. 1885 (2021) 5 - p. 052022 , 2021
Link:
https://doi.org/10.1088/1742-6596/1885/5/052022
RT Journal T1 <Title>The Study on AlxGa1-xN Film Deposition by Radio Frequency Magnetron Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1742-6596_1885_5_052022&Exemplar=1&LAN=DE A1 Deng, Danxia A1 Qin, Zuoyan A1 Hu, Hao A1 Jin, Lei A1 Sun, Zhenhua A1 Wu, Honglei PB IOP Publishing YR 2021 SN 1742-6588 SN 1742-6596 JF Journal of Physics: Conference Series VO 1885 IS 5 SP 052022 LK http://dx.doi.org/https://doi.org/10.1088/1742-6596/1885/5/052022 DO https://doi.org/10.1088/1742-6596/1885/5/052022 SF ELIB - SuUB Bremen
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