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1 Ergebnisse
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Atomic layer deposition of AlN on different SiC surfaces:
Beshkova, M
;
Deminskyi, P
;
Hsu, C-W
...
Journal of Physics: Conference Series. 2240 (2022) 1 - p. 012004 , 2022
Link:
https://doi.org/10.1088/1742-6596/2240/1/012004
RT Journal T1 <Title>Atomic layer deposition of AlN on different SiC surfaces</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1742-6596_2240_1_012004&Exemplar=1&LAN=DE A1 Beshkova, M A1 Deminskyi, P A1 Hsu, C-W A1 Shtepliuk, I A1 Avramova, I A1 Yakimova, R A1 Pedersen, H PB IOP Publishing YR 2022 SN 1742-6588 SN 1742-6596 JF Journal of Physics: Conference Series VO 2240 IS 1 SP 012004 LK http://dx.doi.org/https://doi.org/10.1088/1742-6596/2240/1/012004 DO https://doi.org/10.1088/1742-6596/2240/1/012004 SF ELIB - SuUB Bremen
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