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1 Ergebnisse
1
Smart optical measurement probe for autonomously detecting ..:
Guan, Yizhao
;
Masui, Shuzo
;
Kadoya, Shotaro
..
Journal of Physics: Conference Series. 2368 (2022) 1 - p. 012014 , 2022
Link:
https://doi.org/10.1088/1742-6596/2368/1/012014
RT Journal T1
Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1742-6596_2368_1_012014&Exemplar=1&LAN=DE A1 Guan, Yizhao A1 Masui, Shuzo A1 Kadoya, Shotaro A1 Michihata, Masaki A1 Takahashi, Satoru PB IOP Publishing YR 2022 SN 1742-6588 SN 1742-6596 JF Journal of Physics: Conference Series VO 2368 IS 1 SP 012014 LK http://dx.doi.org/https://doi.org/10.1088/1742-6596/2368/1/012014 DO https://doi.org/10.1088/1742-6596/2368/1/012014 SF ELIB - SuUB Bremen
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