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1 Ergebnisse
1
Effect of bias voltage on microstructure and properties of ..:
Yubao, Zhang
;
Zhigang, Li
;
Jinfeng, Li
..
IOP Conference Series: Earth and Environmental Science. 267 (2019) 4 - p. 042126 , 2019
Link:
https://doi.org/10.1088/1755-1315/267/4/042126
RT Journal T1 <Title>Effect of bias voltage on microstructure and properties of magnetron sputtering TaN coating</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1755-1315_267_4_042126&Exemplar=1&LAN=DE A1 Yubao, Zhang A1 Zhigang, Li A1 Jinfeng, Li A1 Nan, Zhang A1 Hongtao, Zhao PB IOP Publishing YR 2019 SN 1755-1307 SN 1755-1315 JF IOP Conference Series: Earth and Environmental Science VO 267 IS 4 SP 042126 LK http://dx.doi.org/https://doi.org/10.1088/1755-1315/267/4/042126 DO https://doi.org/10.1088/1755-1315/267/4/042126 SF ELIB - SuUB Bremen
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