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Fabrication of MEMS cantilever using laser micromachine:
Johari, S.
;
Zainol, M. Z.
;
Azman, A. A.
..
IOP Conference Series: Materials Science and Engineering. 340 (2018) - p. 012010 , 2018
Link:
https://doi.org/10.1088/1757-899x/340/1/012010
RT Journal T1 <Title>Fabrication of MEMS cantilever using laser micromachine</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1757-899x_340_1_012010&Exemplar=1&LAN=DE A1 Johari, S. A1 Zainol, M. Z. A1 Azman, A. A. A1 Mazalan, M. A1 Wahab, Y. PB IOP Publishing YR 2018 SN 1757-8981 SN 1757-899X JF IOP Conference Series: Materials Science and Engineering VO 340 SP 012010 LK http://dx.doi.org/https://doi.org/10.1088/1757-899x/340/1/012010 DO https://doi.org/10.1088/1757-899x/340/1/012010 SF ELIB - SuUB Bremen
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