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Local laser annealing of 3C-SiC film deposited on the silic..:
Avramchuk, A V
;
Komissarov, I V
;
Mikhalik, M M
...
IOP Conference Series: Materials Science and Engineering. 475 (2019) - p. 012036 , 2019
Link:
https://doi.org/10.1088/1757-899x/475/1/012036
RT Journal T1 <Title>Local laser annealing of 3C-SiC film deposited on the silicon substrate by CVD</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1757-899x_475_1_012036&Exemplar=1&LAN=DE A1 Avramchuk, A V A1 Komissarov, I V A1 Mikhalik, M M A1 Fominski, V Yu A1 Romanov, R I A1 Sultanov, A O A1 Siglovaya, N V A1 Ryndya, S M A1 Gusev, A S A1 Labunov, V A A1 Kargin, N I PB IOP Publishing YR 2019 SN 1757-899X JF IOP Conference Series: Materials Science and Engineering VO 475 SP 012036 LK http://dx.doi.org/https://doi.org/10.1088/1757-899x/475/1/012036 DO https://doi.org/10.1088/1757-899x/475/1/012036 SF ELIB - SuUB Bremen
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